Ceramic Substrate Warpage Inspection Equipment

Ceramic Substrate Warpage Inspection Equipment	CMW100
Product Description	1.This fully automatic precision measurement system is dedicated to ceramic substrate warpage, performing high-precision scanning of 3D surface topography and quantitative evaluation of warpage on ceramic substrates. 2.Equipped with a high-precision motion platform and professional analysis software, the equipment rapidly acquires full-surface height data of substrates and automatically calculates key profile parameters including warpage, flatness and thickness, providing reliable data support for process optimization and quality judgment.
Applications	1.Ceramic substrates are widely adopted in general semiconductor-related industries, covering fiber-optic communication, electronic appliances, new energy vehicles, mechanical engineering, aerospace, military equipment and other fields. 2.The measurement supports ceramic substrates such as aluminum oxide (Al₂O₃), aluminum nitride (AlN), silicon nitride (Si₃N₄). It is of great significance for automated quality control and data-driven management at the upstream of the industry.
Processing Method	Non-contact multi-station automatic inspection
Applicable Products	Multiple sizes including 6070, 6090 (custom development available according to product dimensions)
Camera Specification	3D camera
Inspection Throughput	≥ 100 pcs/min (varies depending on product dimensions)
Inspection Precision	±3μm
Repeatability	≥8 μm (between stations)