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| Ceramic Substrate AOI Equipment | CAI Series |
| Product Description | This equipment is suitable for ceramic substrates. Adopting a multi-channel optical imaging solution, it achieves high-efficiency and high-accuracy visual defect inspection, avoids missed detections in manual inspection, and supports data traceability and statistics. |
| Applications | 1. Ceramic substrates are widely used in general semiconductor-related fields, including fiber optics communication, electronic appliances, new energy vehicles, mechanical engineering, aerospace, military equipment and other sectors. 2. The measurement supports ceramic substrates such as aluminum oxide (Al₂O₃), aluminum nitride (AlN), silicon nitride (Si₃N₄). It is of great significance for automated quality control and data-driven management at the upstream of the industry |
| Inspection Method | Non-contact automated vision inspection |
| Applicable Products | Multiple sizes including 6070, 6090 (custom development available according to product dimensions) |
| Camera Specification | Line scan camera (various high-precision camera models optional) |
| Inspection Throughput | ≥ 50 pcs/min (varies depending on product dimensions) |
Inspection Surface | Synchronous inspection of front and back sides |
| Inspection Precision | ≥ 12 μm (depends on camera configuration) |
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