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| Wafer Dicing Defect Inspection Equipment | WID100 |
| Product Description | Inspection equipment targeting the wafer packaging sector. Core features: 1.Core technology: Integrated high-precision optical system, high-precision motion system and intelligent AI algorithms 2. Inspection capability: Accurately identify wafer surface defects and dicing defects |
| Applications | Conduct comprehensive visual defect inspection on scribe lines and die edges after wafers are cut by laser or blade |
| Inspection Method | Non-contact automated vision inspection |
| Applicable Materials | Integrated circuit wafers |
| Camera Specification | 4K 5 μm line scan camera |
Objective Magnification | 1X, 5X, 10X optional |
| Pixel Resolution | 1 μm (based on 5X objective) |
| Detection Precision | 1 μm (based on 6X objective) |