Wafer Final AOI Series Defect Inspection Equipment

Wafer Final AOI Series Defect Inspection Equipment	WIF100
Product Description	1. This fully automatic macro visual inspection system is dedicated to the efficient identification and classification of various macro defects on unpatterned wafer surfaces. 2. The system supports automatic loading & unloading, automated inspection and defect classification. It effectively replaces manual visual inspection and greatly improves outgoing quality control efficiency.
Applications	1. Final visual inspection, incoming quality check and pre-shipment quality screening for unpatterned wafer production lines 2. Surface quality evaluation of unpatterned wafers after dicing, grinding and polishing processes 3. Statistical analysis of macro defects during semiconductor material R&D
Inspection Method	Area imaging via multi-angle camera array combined with high-intensity illumination
Applicable Materials	Ge, GaAs, InP single-crystal substrates
Compatible Wafer Sizes	2~6 inch wafers
Detection Precision	≥10um