Wafer Defect Inspection Fully automatic Equipment

Wafer Defect Inspection Equipment	WID100
Product Description	This system is an automatic / semi-automatic visual inspection platform, dedicated to high-efficiency identification and classification of various micro-defects on bare substrates and patterned epitaxial wafer surfaces. The fully automatic version supports automatic loading & unloading, integrated macro and microscopic inspection, automated detection and defect classification. It effectively replaces manual visual inspection and greatly improves outgoing quality control efficiency.
Applications	1.Incoming inspection of substrate wafers at epitaxy foundries 2.Quality control inspection for post-epitaxy processes
Inspection Method	Non-contact automated vision inspection
Applicable Materials	GaAs, GaSb, InP substrates and epitaxial layers
Camera Specification	4K 5 μm line scan camera
Objective Magnification	10X、20X
Pixel Resolution	0.5μm/0.25μm
Detection Precision	2μm/1μm